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The effect of the driving frequency on the optimum hole diameter for efficient multi-hole electrode RF capacitively coupled plasma
Lee, HunSu, Kim, EunAe, Lee, YunSeong, Chang, HongYoungVolume:
547
Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2012.11.045
Date:
November, 2013
File:
PDF, 319 KB
english, 2013