Origin of growth defects in CVD diamond epitaxial films

Diamond and Related Materials 2008 / 1 Vol. 17; Iss. 1

Origin of growth defects in CVD diamond epitaxial films

Tallaire, A., Kasu, M., Ueda, K., Makimoto, T.
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Volume:
17
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/j.diamond.2007.10.003
Date:
January, 2008
File:
PDF, 814 KB
english, 2008
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