Effects of crystalline regrowth on dopant profiles in...

  • Main
  • 2004 / 05
  • Effects of crystalline regrowth on dopant profiles in...
Applied Surface Science 2004 / 05

Effects of crystalline regrowth on dopant profiles in preamorphized silicon

HOPSTAKEN, M
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Language:
english
Journal:
Applied Surface Science
DOI:
10.1016/S0169-4332(04)00424-6
Date:
May, 2004
File:
PDF, 173 KB
english, 2004
Conversion to is in progress
Conversion to is failed