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Metal-assisted homogeneous etching of single crystal silicon: A novel approach to obtain an ultra-thin silicon wafer
Bai, Fan, Li, Meicheng, Song, Dandan, Yu, Hang, Jiang, Bing, Li, YingfengVolume:
273
Language:
english
Journal:
Applied Surface Science
DOI:
10.1016/j.apsusc.2013.01.196
Date:
May, 2013
File:
PDF, 528 KB
english, 2013