Amorphous carbon films PACVD in CH4–CO2 under pulsed and...

Diamond and Related Materials 2005 / 3 Vol. 14; Iss. 3-7

Amorphous carbon films PACVD in CH4–CO2 under pulsed and continuous substrate bias conditions

Gottardi, G., Laidani, N., Bartali, R., Filippi, M., Calliari, L., Brusa, R.S., Mariazzi, S., Macchi, C., Anderle, M.
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Volume:
14
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/j.diamond.2004.10.016
Date:
March, 2005
File:
PDF, 383 KB
english, 2005
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