Deposition of carbon nitride via hot filament assisted CVD...

Diamond and Related Materials 1997 / 12 Vol. 6; Iss. 12

Deposition of carbon nitride via hot filament assisted CVD and pulsed laser deposition

Johnson, D.J., Chen, Yan, He, Yue, Prince, R.H.
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Volume:
6
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/S0925-9635(97)00142-8
Date:
December, 1997
File:
PDF, 1.31 MB
english, 1997
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