Fabrication of ridge waveguide structure from photosensitive TiO2/ormosil hybrid films by using an ultraviolet soft imprint technique
Zhang, Xuehua, Que, Wenxiu, Chen, Jing, Gao, Tianxi, Hu, Jiaxing, Liu, WeiguoVolume:
531
Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2012.12.073
Date:
March, 2013
File:
PDF, 650 KB
english, 2013