Amorphous hydrogenated carbon films deposited by PECVD in methane atmospheres highly diluted in argon: effect of the substrate temperature
Capote, G., Freire, F.L., Jacobsohn, L.G., Mariotto, G.Volume:
13
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/j.diamond.2003.11.030
Date:
April, 2004
File:
PDF, 138 KB
english, 2004