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Cross-sectional study of high spatial frequency ripples performed on silicon using nanojoule femtosecond laser pulses at high repetition rate
Le Harzic, R., Menzel, M., Henning, S., Heilmann, A., Stracke, F., Zimmermann, H.Volume:
305
Language:
english
Journal:
Applied Surface Science
DOI:
10.1016/j.apsusc.2014.03.159
Date:
June, 2014
File:
PDF, 1.07 MB
english, 2014