Phosphorus site after CIRA implantation of type IIa diamond

Phosphorus site after CIRA implantation of type IIa diamond

Casanova, N, Gheeraert, E, Deneuville, A, Uzan-Saguy, C, Kalish, R
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Volume:
10
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/S0925-9635(00)00386-1
Date:
March, 2001
File:
PDF, 127 KB
english, 2001
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