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Formation of delta-doped, buried conducting layers in diamond, by high-energy, B-ion implantation
Uzan-Saguy, C., Kalish, R., Walker, R., Jamieson, D.N., Prawer, S.Volume:
7
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/S0925-9635(98)00231-3
Date:
October, 1998
File:
PDF, 116 KB
english, 1998