Synthesis and characterization of zirconium oxynitride...

Materials Chemistry and Physics 2013 / 8 Vol. 141; Iss. 1

Synthesis and characterization of zirconium oxynitride ZrOxNy coatings deposited via unbalanced DC magnetron sputtering

Cubillos, G.I., Olaya, J.J., Bethencourt, M., Antorrena, G., El Amrani, K.
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Volume:
141
Language:
english
Journal:
Materials Chemistry and Physics
DOI:
10.1016/j.matchemphys.2013.04.012
Date:
August, 2013
File:
PDF, 3.07 MB
english, 2013
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