Suppression of interfacial boron accumulation and defect density in molecular beam epitaxial silicon
Dawei Gong, Xin Wei, Fang Lu, Qinhua Wang, Henghui Sun, Xun WangVolume:
88
Year:
1993
Language:
english
Pages:
4
DOI:
10.1016/0038-1098(93)90634-y
File:
PDF, 264 KB
english, 1993