Wide-bandwidth piezoelectric energy harvester integrated...

Microelectronic Engineering 2013 / 11 Vol. 111

Wide-bandwidth piezoelectric energy harvester integrated with parylene-C beam structures

Huang, Po-Cheng, Tsai, Tung-Hsiang, Yang, Yao-Joe
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Volume:
111
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2013.03.158
Date:
November, 2013
File:
PDF, 1.80 MB
english, 2013
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