Role of Annealing Conditions on Surface Passivation Properties of ALD Al2O3 Films
Kersten, Friederike, Schmid, Alexander, Bordihn, Stefan, Müller, Jörg W., Heitmann, JohannesVolume:
38
Year:
2013
Language:
english
Journal:
Energy Procedia
DOI:
10.1016/j.egypro.2013.07.354
File:
PDF, 354 KB
english, 2013