NCD film as an active gate layer in chemFET structures

Diamond and Related Materials 2004 / 4 Vol. 13; Iss. 4-8

NCD film as an active gate layer in chemFET structures

Guzdek, T., Szmidt, J., Dudek, M., Niedzielski, P.
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Volume:
13
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/j.diamond.2003.11.100
Date:
April, 2004
File:
PDF, 406 KB
english, 2004
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