Mechanical properties and thermal stability of SiBCN films...

Diamond and Related Materials 2013 / 04 Vol. 34

Mechanical properties and thermal stability of SiBCN films prepared by ion beam assisted sputter deposition

Choi, Junho, Hayashi, Naohiro, Kato, Takahisa, Kawaguchi, Masahiro
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Volume:
34
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/j.diamond.2013.02.010
Date:
April, 2013
File:
PDF, 699 KB
english, 2013
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