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Flexible piezoelectric cantilevers fabricated on polyimide substrate
Petroni, S., Maruccio, G., Guido, F., Amato, M., Campa, A., Passaseo, A., Todaro, M.T., De Vittorio, M.Volume:
98
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2012.05.055
Date:
October, 2012
File:
PDF, 587 KB
english, 2012