Fabrication of SiO2-stacked diamond membranes and their...

Diamond and Related Materials 2011 / 4 Vol. 20; Iss. 4

Fabrication of SiO2-stacked diamond membranes and their characteristics for microelectromechanical applications

Bayram, Baris
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Volume:
20
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/j.diamond.2011.01.047
Date:
April, 2011
File:
PDF, 1.11 MB
english, 2011
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