Temperature effect on the nitrogen insertion in carbon...

Temperature effect on the nitrogen insertion in carbon nitride films deposited by ECR

Bouchet-Fabre, B., Fernandez, V., Gohier, A., Parent, Ph., Laffon, C., Angleraud, B., Tessier, P.Y., Minea, T.M.
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Volume:
18
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/j.diamond.2009.01.042
Date:
September, 2009
File:
PDF, 684 KB
english, 2009
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