Crystallization of alumina films deposited by reactive...

Surface and Coatings Technology 2013 / 08 Vol. 228

Crystallization of alumina films deposited by reactive magnetron sputtering with resputtering technique at low temperature

Zhang, Xiaopeng, Zhu, Jiaqi, Zhang, Lixia, Kishimoto, Kikuo, Du, ShanYi, Yin, Xunbo
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
228
Language:
english
Journal:
Surface and Coatings Technology
DOI:
10.1016/j.surfcoat.2012.05.074
Date:
August, 2013
File:
PDF, 669 KB
english, 2013
Conversion to is in progress
Conversion to is failed