Growth and characterization of polar and nonpolar ZnO film...

Growth and characterization of polar and nonpolar ZnO film grown on sapphire substrates by using atomic layer deposition

Kim, Ki-Wook, Son, Hyo-Soo, Choi, Nak-Jung, Kim, Jihoon, Lee, Sung-Nam
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Volume:
546
Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2013.03.071
Date:
November, 2013
File:
PDF, 692 KB
english, 2013
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