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Modeling of MEMS resonator piezoelectric disc by means of an equicharge current source method
Elmaimouni, L., Ratolojanahary, F.E., Lefebvre, J.E., Yu, J.G., Raherison, A., Gryba, T.Volume:
53
Language:
english
Journal:
Ultrasonics
DOI:
10.1016/j.ultras.2013.03.011
Date:
September, 2013
File:
PDF, 3.35 MB
english, 2013