A study of SiO layers on Si using cathodoluminescence...

Solid-State Electronics 1973 Vol. 16; Iss. 7

A study of SiO layers on Si using cathodoluminescence spectra

J. Peter Mitchell, Douglas G. Denure
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Volume:
16
Year:
1973
Language:
english
Pages:
15
DOI:
10.1016/0038-1101(73)90179-2
File:
PDF, 850 KB
english, 1973
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