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Membrane-Type Surface Stress Sensor with Piezoresistive Readout
Loizeau, Frédéric, Akiyama, Terunobu, Gautsch, Sebastian, Vettiger, Peter, Yoshikawa, Genki, de Rooij, NicoVolume:
47
Year:
2012
Language:
english
Journal:
Procedia Engineering
DOI:
10.1016/j.proeng.2012.09.339
File:
PDF, 793 KB
english, 2012