Theoretical estimates of the sheet resistance of Gaussian n-type ion-implanted layers in semiconductors: Phosphorus in silicon
L.M. Scarfone, J.D. ChlipalaVolume:
22
Year:
1979
Language:
english
Pages:
8
DOI:
10.1016/0038-1101(79)90018-2
File:
PDF, 891 KB
english, 1979