Determination of existing stress in silicon films on sapphire substrate using Raman spectroscopy
Th. Englert, G. Abstreiter, J. PontcharraVolume:
23
Year:
1980
Language:
english
Pages:
3
DOI:
10.1016/0038-1101(80)90164-1
File:
PDF, 252 KB
english, 1980