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Nanostructure formation of Cu/Si(100) thin film induced by ion beam bombardment
Tang, G.S., Liu, H.Y., Zeng, F., Pan, F.Volume:
89
Language:
english
Journal:
Vacuum
DOI:
10.1016/j.vacuum.2012.03.039
Date:
March, 2013
File:
PDF, 1.33 MB
english, 2013