Contact resistivities of Al and Ti on Si measured by a...

Solid-State Electronics 1989 Vol. 32; Iss. 11

Contact resistivities of Al and Ti on Si measured by a self-aligned vertical Kelvin test resistor structure

Wen Luh Yang, Tan Fu Lei, Chung Len Lee
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
32
Year:
1989
Language:
english
Pages:
5
DOI:
10.1016/0038-1101(89)90162-7
File:
PDF, 440 KB
english, 1989
Conversion to is in progress
Conversion to is failed