![](/img/cover-not-exists.png)
Comparative study of air and vacuum annealing atmosphere towards Pt/Ti–W/SiO2 stability
Simon, Pardis, Nazon, Julien, Domenichini, Bruno, Bourgeois, SylvieVolume:
548
Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2013.09.019
Date:
December, 2013
File:
PDF, 1.40 MB
english, 2013