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Characterization of arsenphosphosilicate glass films for VLSI applications—Part I. Composition and physicochemical properties
L. Zambov, I. Nedev, Y. YanakievVolume:
34
Year:
1991
Language:
english
Pages:
7
DOI:
10.1016/0038-1101(91)90062-4
File:
PDF, 573 KB
english, 1991