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Characterization of arsenphosphosilicate glass films for VLSI applications—Part II. Step coverage and planarization
L. Zambov, Y. Yanakiev, I. Nedev, M. AnastassovaVolume:
34
Year:
1991
Language:
english
Pages:
8
DOI:
10.1016/0038-1101(91)90063-5
File:
PDF, 909 KB
english, 1991