Polarity asymmetry of electrical characteristics of thin nitrided polyoxides prepared by in-situ multiple rapid thermal processing
G.Q. Lo, A.W. Cheung, D.L. Kwong, N.S. AlviVolume:
34
Year:
1991
Language:
english
Pages:
4
DOI:
10.1016/0038-1101(91)90086-e
File:
PDF, 305 KB
english, 1991