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Properties of the fluorine-implanted Si-SiO2 system
G.S. Virdi, C.M.S. Rauthan, B.C. Pathak, W.S. KhokleVolume:
34
Year:
1991
Language:
english
Pages:
4
DOI:
10.1016/0038-1101(91)90236-r
File:
PDF, 359 KB
english, 1991