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Structure and property features of the catalyst-assisted carbon nanostructures on Si wafer by catalyst ion implantation and ECR-CVD
Lin, Chen Chun, Lo, Po Yuan, Lin, Chao Hsun, Kuo, Cheng TzuVolume:
14
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/j.diamond.2004.12.031
Date:
March, 2005
File:
PDF, 345 KB
english, 2005