Contact resistivity of shallow junctions formed by implantation through Pt or PtSi
Bing-Yue Tsui, Mao-Chieh ChenVolume:
35
Year:
1992
Language:
english
Pages:
6
DOI:
10.1016/0038-1101(92)90152-3
File:
PDF, 566 KB
english, 1992