Study on SiC layers synthesized with carbon ion beam at low...

Diamond and Related Materials 2000 / 9 Vol. 9; Iss. 9-10

Study on SiC layers synthesized with carbon ion beam at low substrate temperature

Yan, H, Wang, B, Song, X.M, Tan, L.W, Zhang, S.J, Chen, G.H, Wong, S.P, Kwok, R.W.M, Lau, Leo W.M
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Volume:
9
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/S0925-9635(00)00308-3
Date:
September, 2000
File:
PDF, 179 KB
english, 2000
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