An inversion method for the complete characterization of transparent film-absorbing substrate systems using multiple angle ellipsometry
T. Easwarakhanthan, Z. Ouennoughi, S. RaveletVolume:
35
Year:
1992
Language:
english
Pages:
10
DOI:
10.1016/0038-1101(92)90288-n
File:
PDF, 730 KB
english, 1992