Capacitance method for determination of LDD MOSFET geometrical parameters
P. Vitanov, T. Dimitrova, R. Kamburova, K. FilljovVolume:
35
Year:
1992
Language:
english
Pages:
7
DOI:
10.1016/0038-1101(92)90329-b
File:
PDF, 1.07 MB
english, 1992