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Analysis of self-aligned MOSFETs with modulation-doped SiGe channels
F. Jain, M. Gokhale, S.K. Islam, C.L. ChungVolume:
36
Year:
1993
Language:
english
Pages:
6
DOI:
10.1016/0038-1101(93)90034-n
File:
PDF, 398 KB
english, 1993