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Non-destructive characterisation of SOI wafers using spectroscopic reflectrometry
P. Smeys, U. Magnusson, J.P. ColingeVolume:
36
Year:
1993
Language:
english
Pages:
4
DOI:
10.1016/0038-1101(93)90203-3
File:
PDF, 306 KB
english, 1993