Influence of N2/Ar gas mixture ratio and annealing on...

Diamond and Related Materials 2008 / 6 Vol. 17; Iss. 6

Influence of N2/Ar gas mixture ratio and annealing on optical properties of SiCBN thin films prepared by rf sputtering

Vijayakumar, Arun, Todi, Ravi M., Warren, Andrew P., Sundaram, Kalpathy B.
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Volume:
17
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/j.diamond.2008.01.097
Date:
June, 2008
File:
PDF, 774 KB
english, 2008
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