Mirror control with strain feedback and charge drive for...

Sensors and Actuators A: Physical 2014 / 08 Vol. 214

Mirror control with strain feedback and charge drive for high-performance of scanning probe microscope positioners

Zhang, Jie, Zhang, Liansheng, Liu, Yongbin, Feng, Zhihua
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Volume:
214
Language:
english
Journal:
Sensors and Actuators A: Physical
DOI:
10.1016/j.sna.2014.04.030
Date:
August, 2014
File:
PDF, 2.06 MB
english, 2014
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