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Effects of annealing and plasma treatment on the electrical and optical properties of spin-coated ITZO films
Lee, Dong-min, Kim, Jae-Kwan, Hao, Jinchen, Kim, Han-Ki, Yoon, Jae-Sik, Lee, Ji-MyonVolume:
583
Language:
english
Journal:
Journal of Alloys and Compounds
DOI:
10.1016/j.jallcom.2013.09.008
Date:
January, 2014
File:
PDF, 951 KB
english, 2014