Effects of silicon incorporation on composition, structure...

Diamond and Related Materials 2010 / 11 Vol. 19; Iss. 11

Effects of silicon incorporation on composition, structure and electric conductivity of cubic boron nitride thin films

Ying, J., Zhang, X.W., Fan, Y.M., Tan, H.R., Yin, Z.G.
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Volume:
19
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/j.diamond.2010.08.004
Date:
November, 2010
File:
PDF, 831 KB
english, 2010
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