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Repeatability and reproducibility study of thin film optical measurement system
Kuo, Chil-Chyuan, Huang, Po-JenhVolume:
124
Language:
english
Journal:
Optik - International Journal for Light and Electron Optics
DOI:
10.1016/j.ijleo.2012.10.015
Date:
September, 2013
File:
PDF, 1.28 MB
english, 2013