Non-sticky polyvinylsilazane stamp with high durability for...

Microelectronic Engineering 2012 / 10 Vol. 98

Non-sticky polyvinylsilazane stamp with high durability for UV-nanoimprint lithography

Park, Hyun-Ha, Park, Sungjune, Kim, Hana, Lim, HyungJun, Kim, Dong-Pyo, Lee, JaeJong
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
98
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2012.07.071
Date:
October, 2012
File:
PDF, 856 KB
english, 2012
Conversion to is in progress
Conversion to is failed