High molecular weight polystyrene as very sensitive...

Microelectronic Engineering 2012 / 10 Vol. 98

High molecular weight polystyrene as very sensitive electron beam resist

Con, Celal, Dey, Ripon, Ferguson, Mark, Zhang, Jian, Mansour, Raafat, Yavuz, Mustafa, Cui, Bo
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Volume:
98
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2012.07.005
Date:
October, 2012
File:
PDF, 624 KB
english, 2012
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