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Ion beam assisted deposition of a tungsten compound layer on 6H-silicon carbide
Weishart, H., Heera, V., Matz, W., Skorupa, W.Volume:
6
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/S0925-9635(97)00070-8
Date:
August, 1997
File:
PDF, 475 KB
english, 1997