High accuracy flatness metrology within the European...

Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment 2013 / 5 Vol. 710

High accuracy flatness metrology within the European Metrology Research Program

Schulz, Michael, Ehret, Gerd, Křen, Petr
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Volume:
710
Language:
english
Journal:
Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
DOI:
10.1016/j.nima.2012.10.112
Date:
May, 2013
File:
PDF, 1.04 MB
english, 2013
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